The thin film hardness estimation by nanoindentation is influenced by substrate beyond a critical relative indentation depth (CRID). In this study we developed a methodology to identify the CRID in amorphous carbon film. Three types of amorphous carbon film deposited on silicon have been studied. The nanoindentation tests were carried out applying a 0.1-10 mN load range on a Berkovich diamond tip, leading to penetration depth-to-film thickness ratios of 8-100%. The work regained during unloading (W-e) and the work performed during loading (W-t) was estimated for each indentation. The trend af unload-to-load ratio (W-e/W-t) data as a function of depth has been studied. W-e/W-t depth profiles showed a sigmoid trend and the data were fitted by means of a Ilill sigmoid equation. Using Ilill sigmoid fit and a simple analytical method it is possible to estimate CRID of carbon based films.

Critical relative indentation depth in carbon based thin films

Bartali, Ruben;Vaccari, Alessandro;Micheli, Victor;Gottardi, Gloria;Pandiyan, Rajesh;Collini, Amos;Lori, Paolo;Coser, Gianni;Bensaada Laidani, Nadhira
2014

Abstract

The thin film hardness estimation by nanoindentation is influenced by substrate beyond a critical relative indentation depth (CRID). In this study we developed a methodology to identify the CRID in amorphous carbon film. Three types of amorphous carbon film deposited on silicon have been studied. The nanoindentation tests were carried out applying a 0.1-10 mN load range on a Berkovich diamond tip, leading to penetration depth-to-film thickness ratios of 8-100%. The work regained during unloading (W-e) and the work performed during loading (W-t) was estimated for each indentation. The trend af unload-to-load ratio (W-e/W-t) data as a function of depth has been studied. W-e/W-t depth profiles showed a sigmoid trend and the data were fitted by means of a Ilill sigmoid equation. Using Ilill sigmoid fit and a simple analytical method it is possible to estimate CRID of carbon based films.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11582/261021
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