X-ray diffraction using Seeman-Bohlin geomeetry and scanning electron microscopy measurements have been carried out on 30 keV O2+ -implanted Al at various doses.The proposals that the crystal structure of gamma-Al2O3 is stable and alpha-Al2O3 becomes amorphous under ion-bombardment fit well with the present observations.
Structural investigation of Al2O3 formed by ion implantation at various doses
Dapor, Maurizio;Anderle, Mariano;Canteri, Roberto
1989-01-01
Abstract
X-ray diffraction using Seeman-Bohlin geomeetry and scanning electron microscopy measurements have been carried out on 30 keV O2+ -implanted Al at various doses.The proposals that the crystal structure of gamma-Al2O3 is stable and alpha-Al2O3 becomes amorphous under ion-bombardment fit well with the present observations.File in questo prodotto:
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