Influence of Implant Dose and Target Temperature on Crystal Quality and Junction Depth of Boron-Doped Silicon Layers

30 keV boron ions are implanted at doses of 2x1014 and 2x1015 cm−2 in 100 silicon wafers kept at room or liquid-nitrogen temperatures. The samples are analyzed by double-crystal X-ray diffraction, transmission electron microscopy and secondary ion-mass spectrometry before and after furnace annealing at 800{\textdegree}C. The low-dose implant does not amorphize the substrate at any of the temperatures, and residual defects together with a remarkably enhanced boron diffusion are observed after annealing. The high-dose implant amorphizes the substrate only at low temperature. In this case, unlike the room-temperature implant, the absence of any residual defect, the incorporation of the dopant in substitutional position and a negligible profile braodening of boron are obtained after annealing. In principle, this process proves itself a promising step for the fabrication of p+/n shallow junctions with good electrical characteristics.