This work presents the design, fabrication and characterization of a Si-based microseparation module for liquid chromatography (LC), targeted for agrofood applications and in particular for wine quality monitoring. The microsystem chip is a Silicon/Pyrex structure realized by anodic bonding.The basic Si-chip modules are an open tubular microcolumn with inlet/outlet for fluidic connections, a platinum heater and a Pt three-electrode amperometric sensor. Analytical calculations and finite element analysis have been performed to optimize the microcolumn design. Microchannels and inlet/outlet have been fabricated by deep reactive ion etching (DRIE) and tetra methyl ammonium hydroxide (TMAH) wet etching, respectively.The column has been functionalized with n-octyltriethoxysilane (C8-TEOS). Preliminary characterization tests of the microcolumn have beenperformed by evaluating the capability of the system to retain test solutions of acetic acid.
Fabrication of a MEMS-based separation module for liquid chromatography
Guarnieri, Vittorio;Lorenzelli, Leandro;Collini, Cristian;Decarli, Massimiliano;Adami, Andrea;Potrich, Cristina;Lunelli, Lorenzo;Canteri, Roberto;Pederzolli, Cecilia
2008-01-01
Abstract
This work presents the design, fabrication and characterization of a Si-based microseparation module for liquid chromatography (LC), targeted for agrofood applications and in particular for wine quality monitoring. The microsystem chip is a Silicon/Pyrex structure realized by anodic bonding.The basic Si-chip modules are an open tubular microcolumn with inlet/outlet for fluidic connections, a platinum heater and a Pt three-electrode amperometric sensor. Analytical calculations and finite element analysis have been performed to optimize the microcolumn design. Microchannels and inlet/outlet have been fabricated by deep reactive ion etching (DRIE) and tetra methyl ammonium hydroxide (TMAH) wet etching, respectively.The column has been functionalized with n-octyltriethoxysilane (C8-TEOS). Preliminary characterization tests of the microcolumn have beenperformed by evaluating the capability of the system to retain test solutions of acetic acid.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
