Design and analysis of piezoelectric MEMS actuator based SIW filter for K/Ka band communication

The article presents a miniaturized Piezoelectric MEMS actuator based SIW filter for K/Ka band communication. The evanescent mode second order Substrate Integrated Waveguide filter is tuned using piezoelectric MEMS actuator. A novel approach of loading the AlN/ZnO based piezoelectric MEMS actuator over the capacitive post of the SIW filter, ensures tunability of the filter. Electric potential of -33 V and -54 V for ZnO and AlN respectively are applied to the top electrode and 0 V to the bottom electrode, making the piezoelectric actuator to deflect in upward direction by 50 µm. For downward deflection of 33 µm, 22 V and 31 V for ZnO and AlN is applied to the top electrode and 0 V to bottom electrode. When actuated in upward and downward direction, resonant frequency band from 25.5 GHz—26.4 GHz shifts 400 MHz in left and right direction respectively in frequency spectrum is observed, making the structure suitable for K/Ka band communication.