Sense by MEMS: Revolutionising Sensing Techniques using Microsystem Technology

The widespread impact of sensors in modern technologies is seen in many consumer and industrial applications, including smartphones, wearables, automotive systems, healthcare devices, and many more. One of the most adopted technologies to manufacture microsensors is Microelectromechanical Systems (MEMS) technology. It belongs to an extremely interdisciplinary branch of engineering and technology with an objective of miniaturisation of conventional sensors and actuators. Widely, it is familiar as a MEMS technology; however, in some parts of the globe, such as in Europe, it is also known as microsystem technology, and in Japan, it is also called micromachine technology. It deals with the fabrication of microsensors as well as microactuators with dedicated microelectronic circuits. The geometrical dimensions that are being realised using the MEMS technology are in the order of a few microns (μm) to 1000s of μm. These tiny dimensions can be visualised by a few examples, such as the diameter of