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EnglishA Monte Carlo code is described, validated, and utilized to calculate the backscattering coefficient from surface layers of Pd deposited on bulk targets of Si. A quantitative evaluation of the backscattering coefficient as a function of the over-layer thickness is provided, as well as a comparison of the simulated results with experimental data concerning Pd thin films with known thicknesses.
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| Titolo: | Backscattered electrons from surface films deposited on bulk targets: A comparison between computational and experimental results | |
| Autori: | ||
| Data di pubblicazione: | 2011 | |
| Rivista: | ||
| Abstract: | A Monte Carlo code is described, validated, and utilized to calculate the backscattering coefficient from surface layers of Pd deposited on bulk targets of Si. A quantitative evaluation of the backscattering coefficient as a function of the over-layer thickness is provided, as well as a comparison of the simulated results with experimental data concerning Pd thin films with known thicknesses. | |
| Handle: | http://hdl.handle.net/11582/34581 | |
| Appare nelle tipologie: | 1.1 Articolo in rivista |
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http://hdl.handle.net/11582/34581
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