Experimental measurements and Monte Carlo simulation of the mean energy of backscattered electrons by Au/Si targets irradiated by electron beams have been made as a function of the Au layer thickness for primary electron energies in the range 8–20 keV. The simulated trends are compared to experimental data. The mean backscattered energy as a function of the layer thickness presents a maximum whose position depends on the primary energy. The simulated and experimental behaviors are in satisfactory agreement. Similarities and differences between experimental and Monte Carlo results are illustrated and briefly discussed. A somewhat unexpected effect is observed: the maximum of the mean backscattered energy of layered targets is higher than that of the elements constituting the system. This effect is discussed on the basis of semi-empirical considerations.
Experimental and computational study of the mean energy of electrons backscattered from surface films
Dapor, Maurizio;
2007-01-01
Abstract
Experimental measurements and Monte Carlo simulation of the mean energy of backscattered electrons by Au/Si targets irradiated by electron beams have been made as a function of the Au layer thickness for primary electron energies in the range 8–20 keV. The simulated trends are compared to experimental data. The mean backscattered energy as a function of the layer thickness presents a maximum whose position depends on the primary energy. The simulated and experimental behaviors are in satisfactory agreement. Similarities and differences between experimental and Monte Carlo results are illustrated and briefly discussed. A somewhat unexpected effect is observed: the maximum of the mean backscattered energy of layered targets is higher than that of the elements constituting the system. This effect is discussed on the basis of semi-empirical considerations.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
