We report on the results from the production of 600 double-sided silicon microstrip detectors for the ALICE experiment. We present the fabrication process and some selected results from the electrical characterization of detectors and test structures. The large amount of experimental data allowed a statistically relevant analysis to be performed. The main technological aspects related to production yield optimization will also be addressed.
Production of ALICE microstrip detectors at ITC-irst
Gregori, Paolo;Bellutti, Pierluigi;Boscardin, Maurizio;Collini, Amos;Dalla Betta, Gian Franco;Pucker, Georg;Zorzi, Nicola
2007-01-01
Abstract
We report on the results from the production of 600 double-sided silicon microstrip detectors for the ALICE experiment. We present the fabrication process and some selected results from the electrical characterization of detectors and test structures. The large amount of experimental data allowed a statistically relevant analysis to be performed. The main technological aspects related to production yield optimization will also be addressed.File in questo prodotto:
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