Separating topographical and chemical analysis of nanostructure of polymer composite in low voltage SEM

The possibility of separating the topographical and chemical information in a polymer nano-composite using low-voltage SEM imaging is demonstrated, when images are acquired with a Concentric Backscattered (CBS) detector. This separation of chemical and topographical information is based on the different angular distribution of electron scattering which were calculated using a Monte Carlo simulation. The simulation based on angular restricted detection was applied to a semi-branched PNIPAM/PEGDA interpenetration network for which a linear relationship of topography SEM contrast and feature height data was observed.