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Dynamic Characterization of Series RF MEMS Switches
2006-01-01 Marchetti, Barbara; Cannella, Ferdinando; Caso, Tammaro; Margesin, Benno; Giacomozzi, Flavio
Effect of temperature on stress and stress gradient during final release process in gold suspended MEMS structures
2009-01-01 Mulloni, Viviana; Giacomozzi, Flavio; Margesin, Benno
Electrical characteristics of floating electrode MEMS capacitive switches
2012-01-01 Michalas, L.; Koutsoureli, M.; Papandreou, E.; Papaioannou, G.; Giacomozzi, Flavio; Colpo, Sabrina; Margesin, Benno
Electrochemical effects during anisotropic bulk-silicon etching with doped and undoped TMAHW solutions
2001-01-01 Bellutti, Pierluigi; Sebastiano, Brida; Faes, Alessandro; Guarnieri, Vittorio; Giacomozzi, Flavio; Margesin, Benno; Zen, Mario
Electromechanical aspects in the optimization of the trasmission characteristics of series ohmic RF-switches
2004-01-01 Giacomozzi, Flavio; M., Bellei; P., Farinelli; G., Mannocchi; R., Marcelli; Margesin, Benno; Mulloni, Viviana
Electromechanical characterization and capacitive behavior of low spring constant - RF MEMS switches
2004-01-01 Rangra, Kamaljit; Margesin, Benno; Giacomozzi, Flavio; Lorenzelli, Leandro; Collini, Cristian; Soncini, Giovanni
Evolution of Electrical Parameters of Dielectric-less Ohmic RF-MEMS Switches during Continuous Actuation Stress
2009-01-01 A., Tazzoli; E., Autizi; M., Barbato; Solazzi, Francesco; Iannacci, Jacopo; P., Farinelli; Giacomozzi, Flavio; Margesin, Benno; R., Sorrentino; G., Meneghesso
Fabrication of a piston-type condenser microphone with structured polysilicon diaphragm
2003-01-01 Margesin, Benno; Faes, Alessandro; Giacomozzi, Flavio; Bagolini, Alvise; Zen, Mario
Fabrication of millimeter wave devices on dielectric membranes by micromachining technology
2002-01-01 Giacomozzi, Flavio; Margesin, Benno; Zen, Mario; R., Marcelli; A., Muller
Fabrication of silicon based micromachined antennas for millimeter-wave applications
2003-01-01 M., Saadaoui; A., Muller; P., Pons; L., Bary; D., Neculoiu; Giacomozzi, Flavio; D., Dubuc; K., Grenier; L., Rabbia; D., Vasilache; R., Plana
| Titolo | Data di pubblicazione | Autore(i) | File |
|---|---|---|---|
| Dynamic Characterization of Series RF MEMS Switches | 1-gen-2006 | Marchetti, Barbara; Cannella, Ferdinando; Caso, Tammaro; Margesin, Benno; Giacomozzi, Flavio | |
| Effect of temperature on stress and stress gradient during final release process in gold suspended MEMS structures | 1-gen-2009 | Mulloni, Viviana; Giacomozzi, Flavio; Margesin, Benno | |
| Electrical characteristics of floating electrode MEMS capacitive switches | 1-gen-2012 | Michalas, L.; Koutsoureli, M.; Papandreou, E.; Papaioannou, G.; Giacomozzi, Flavio; Colpo, Sabrina; Margesin, Benno | |
| Electrochemical effects during anisotropic bulk-silicon etching with doped and undoped TMAHW solutions | 1-gen-2001 | Bellutti, Pierluigi; Sebastiano, Brida; Faes, Alessandro; Guarnieri, Vittorio; Giacomozzi, Flavio; Margesin, Benno; Zen, Mario | |
| Electromechanical aspects in the optimization of the trasmission characteristics of series ohmic RF-switches | 1-gen-2004 | Giacomozzi, Flavio; M., Bellei; P., Farinelli; G., Mannocchi; R., Marcelli; Margesin, Benno; Mulloni, Viviana | |
| Electromechanical characterization and capacitive behavior of low spring constant - RF MEMS switches | 1-gen-2004 | Rangra, Kamaljit; Margesin, Benno; Giacomozzi, Flavio; Lorenzelli, Leandro; Collini, Cristian; Soncini, Giovanni | |
| Evolution of Electrical Parameters of Dielectric-less Ohmic RF-MEMS Switches during Continuous Actuation Stress | 1-gen-2009 | A., Tazzoli; E., Autizi; M., Barbato; Solazzi, Francesco; Iannacci, Jacopo; P., Farinelli; Giacomozzi, Flavio; Margesin, Benno; R., Sorrentino; G., Meneghesso | |
| Fabrication of a piston-type condenser microphone with structured polysilicon diaphragm | 1-gen-2003 | Margesin, Benno; Faes, Alessandro; Giacomozzi, Flavio; Bagolini, Alvise; Zen, Mario | |
| Fabrication of millimeter wave devices on dielectric membranes by micromachining technology | 1-gen-2002 | Giacomozzi, Flavio; Margesin, Benno; Zen, Mario; R., Marcelli; A., Muller | |
| Fabrication of silicon based micromachined antennas for millimeter-wave applications | 1-gen-2003 | M., Saadaoui; A., Muller; P., Pons; L., Bary; D., Neculoiu; Giacomozzi, Flavio; D., Dubuc; K., Grenier; L., Rabbia; D., Vasilache; R., Plana |
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Opzioni
Scopri
Tipologia
- 4 Contributo in Atti di Convegno ... 157
- 4 Contributo in Atti di Convegno ... 157
Data di pubblicazione
- 2020 - 2024 5
- 2010 - 2019 43
- 2000 - 2009 91
- 1990 - 1999 17
- 1986 - 1989 1
Editore
- IEEE 6
- ieeexplore.ieee.org 5
- EuMA 3
- World Scientific 3
- EDA Publishing Association 2
- National Institute for Research a... 2
- World Scientific Publishing 2
- EDA Publishing 1
- FBK - Publishing Services 1
- FBK- Publishing services 1
Serie
- LECTURE NOTES IN ELECTRICAL ENGIN... 1
Keyword
- RF MEMS 12
- MEMS 8
- RF-MEMS 6
- RF-MEMS switch 5
- DRIE 4
- variable isotropy process 3
- electromagnetic simulation 2
- MEMS reliability 2
- micromachining 2
- multimodal circuit 2
Lingua
- eng 134
- spa 4
- ita 1
- rum 1
Accesso al fulltext
- no fulltext 144
- restricted 7
- reserved 4
- open 2