In this paper will be shown that the conditions of the final oxygen plasma process strongly influence the shape of MEMS suspended gold structures. The structures examined have typically a thickness of 1.8 microns, and are produced by patterned gold electrodeposition above a sacrificial photoresist layer which is then removed by oxygen plasma ashing. In general, deformations are strongly reduced lowering the temperature, but the release time increases abruptly. A simple model is presented to explain the experimental observation, and from it can be deduced that yield and inelastic relaxation are critical phenomena responsible for most of the deviations from the ideal planar shape of MEMS structures.
Effect of temperature on stress and stress gradient during final release process in gold suspended MEMS structures
Mulloni, Viviana;Giacomozzi, Flavio;Margesin, Benno
2009-01-01
Abstract
In this paper will be shown that the conditions of the final oxygen plasma process strongly influence the shape of MEMS suspended gold structures. The structures examined have typically a thickness of 1.8 microns, and are produced by patterned gold electrodeposition above a sacrificial photoresist layer which is then removed by oxygen plasma ashing. In general, deformations are strongly reduced lowering the temperature, but the release time increases abruptly. A simple model is presented to explain the experimental observation, and from it can be deduced that yield and inelastic relaxation are critical phenomena responsible for most of the deviations from the ideal planar shape of MEMS structures.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
