This paper presents the manufacturing of micromachined Yagi-Uda antennae for applications in the millimeter and sub-millimeter frequency range. The solutions presented here are based on micromachining of high resistivity, <100> oriented silicon. Also, on wafer millimeter wave comparative measurements of the antenna structures, manufactured using different technological processes are presented. The design of the membrane supported antennae structures, including the transitions, has been performed using the electromagnetic simulator Zeland IE3D [6]. The IE3D software has been used to predict the performance of the membrane-supported antenna in terms of radiation pattern, reflection losses, antenna gain and input impedance
Fabrication of silicon based micromachined antennas for millimeter-wave applications
Giacomozzi, Flavio;
2003-01-01
Abstract
This paper presents the manufacturing of micromachined Yagi-Uda antennae for applications in the millimeter and sub-millimeter frequency range. The solutions presented here are based on micromachining of high resistivity, <100> oriented silicon. Also, on wafer millimeter wave comparative measurements of the antenna structures, manufactured using different technological processes are presented. The design of the membrane supported antennae structures, including the transitions, has been performed using the electromagnetic simulator Zeland IE3D [6]. The IE3D software has been used to predict the performance of the membrane-supported antenna in terms of radiation pattern, reflection losses, antenna gain and input impedanceI documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
