The vacuum evaporated Ti/Au and Ti/Pt/Au metallizzations were studied for the preparation of non-alloyed ohmic contacts to p-type InGaAsP.
Non-alloyed Ti/Au and Ti/Pt/Au ohmic contacts to p-type InGaAsP
Dapor, Maurizio;Micheli, Victor
1993-01-01
Abstract
The vacuum evaporated Ti/Au and Ti/Pt/Au metallizzations were studied for the preparation of non-alloyed ohmic contacts to p-type InGaAsP.File in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.