The fraction of absorbed, backscattered, and transmitted electrons bombarding a thin solid film are calculated as a function of the film thickness both in the absence and in the presence of a substrate. The depth distribution of the absorbed electrons has also been calculated.
Penetration of an electron beam in a thin solid film: The influence of backscattering from the substrate
Dapor, Maurizio
1991-01-01
Abstract
The fraction of absorbed, backscattered, and transmitted electrons bombarding a thin solid film are calculated as a function of the film thickness both in the absence and in the presence of a substrate. The depth distribution of the absorbed electrons has also been calculated.File in questo prodotto:
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