A numerical approach is presented in order to simulate multilayer depth profiles. In many practical cases the normalized measured intensity may be described well by a superimposition of error functions. Here, calculation of the error function has been performed using an approximation formula that allows it to be obtained by a simple but accurate method.Particular attention has been paid to the development of a procedure that can be applied to the fitting of experimental data relative to depth profiling of samples composed of very thin layers.
Development of a numerical simulation of depth profiles of multilayers composed of very thin layers
Dapor, Maurizio;
1989-01-01
Abstract
A numerical approach is presented in order to simulate multilayer depth profiles. In many practical cases the normalized measured intensity may be described well by a superimposition of error functions. Here, calculation of the error function has been performed using an approximation formula that allows it to be obtained by a simple but accurate method.Particular attention has been paid to the development of a procedure that can be applied to the fitting of experimental data relative to depth profiling of samples composed of very thin layers.File in questo prodotto:
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