This paper presents the manufacture of a simple pressure sensing structure supported on polymide membranes obtained by micromachining of a GaAs substrate. The sensing element is a gold on chromium resistor on the polymide membrane. The technological process for the manufacturing of this structure is presented. The sensing element shows high linearity, absence of hysteresis, good sensitivity, and can be used in high-temperature applications
Resistive pressure sensing structures on polymide membranes on GaAs substrate
Giacomozzi, Flavio
2000-01-01
Abstract
This paper presents the manufacture of a simple pressure sensing structure supported on polymide membranes obtained by micromachining of a GaAs substrate. The sensing element is a gold on chromium resistor on the polymide membrane. The technological process for the manufacturing of this structure is presented. The sensing element shows high linearity, absence of hysteresis, good sensitivity, and can be used in high-temperature applicationsFile in questo prodotto:
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