Micromachined platforms were functionalized with nanoporous metal-oxides to obtain multiparametric sensors, hosting gas-sensitive, anemometric and temperature transducers. Nanoporous metal-oxide layer was directly deposited on gas sensing regions of micromachined platform batches by hard-mask patterned supersonic cluster beam deposition. Can-sized sensing units, each equipped with two multiparametric sensors, one miniaturized thermo-hygrometer, front-end analogical and digital electronics, and a ZigBee module for wireless data transmission, were assembled in view of air monitoring applications based on wireless sensor networks. An outdoor, roadside experiment was arranged in downtown Milan, where one wireless sensing unit was continuously operated side by side with standard gaschromatographic instrumentation for air quality measurements. By means of a router PC, data from sensing unit and other instrumentation were collected, merged, and sent to remote data storage server, through UMTS device. Whole-system robustness as well as sensor dataset characteristics were investigated over a run-time period of 18 months.

Long-term outdoor reliability assessment of a wireless unit for air-quality monitoring based on nanostructured films integrated on micromachined platforms

Decarli, Massimiliano;Lorenzelli, Leandro;
2012

Abstract

Micromachined platforms were functionalized with nanoporous metal-oxides to obtain multiparametric sensors, hosting gas-sensitive, anemometric and temperature transducers. Nanoporous metal-oxide layer was directly deposited on gas sensing regions of micromachined platform batches by hard-mask patterned supersonic cluster beam deposition. Can-sized sensing units, each equipped with two multiparametric sensors, one miniaturized thermo-hygrometer, front-end analogical and digital electronics, and a ZigBee module for wireless data transmission, were assembled in view of air monitoring applications based on wireless sensor networks. An outdoor, roadside experiment was arranged in downtown Milan, where one wireless sensing unit was continuously operated side by side with standard gaschromatographic instrumentation for air quality measurements. By means of a router PC, data from sensing unit and other instrumentation were collected, merged, and sent to remote data storage server, through UMTS device. Whole-system robustness as well as sensor dataset characteristics were investigated over a run-time period of 18 months.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11582/81201
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