A new class of H2 sensors made up of mesoscopic polysilicon wires coated by palladium is presented. Using surface micromachining combined with an usual microelectronic planar process, polysilicom wires of the following dimensions have been constructed: from 250 nm up to 3.7 um wide, from 100 um up to 140 um long, about 700 nm thick. Because of their high surface/volume ratio, these wires have shown a very high resistance percentage variation under hydrogen absorption. Enhanced resolution together with a low production cost are the most importand features of this device
Polysilicon mesoscopic wires coated by Pd as high sensitivity H2 sensors
Tibuzzi, Arianna;Margesin, Benno;Zen, Mario;Soncini, Giovanni
2002-01-01
Abstract
A new class of H2 sensors made up of mesoscopic polysilicon wires coated by palladium is presented. Using surface micromachining combined with an usual microelectronic planar process, polysilicom wires of the following dimensions have been constructed: from 250 nm up to 3.7 um wide, from 100 um up to 140 um long, about 700 nm thick. Because of their high surface/volume ratio, these wires have shown a very high resistance percentage variation under hydrogen absorption. Enhanced resolution together with a low production cost are the most importand features of this deviceFile in questo prodotto:
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