FABLIMS, Flexible LIMS for Managing Cleanrooms and Experiments

Conci, [email protected], MicroFabSolutions Fondazione Bruno Kessler (FBK), is a public research institution in Italy, well recognized in two main scientific areas: AI and silicon sensors. The FBK Facility includes more than 1500 sqm of laboratories with cleanrooms for sensor fabrication, dicing and packaging setups, characterization tools. Unique in the Italian panorama, this Facility gives the possibility to develop complete sensors, especially radiation sensors and MEMS. Tents of users accessing the facility every day and hundreds of wafers running around among the cleanrooms require dedicated organization and tools to guarantee traceability, quality, and safety. Since 1995, FBK Facility has invested in having a LIMS (Laboratory Information Management System) to manage all of that, and in 2021 the new LIMS, FabLIMS, was deployed. FabLIMS manages laboratories, users, projects and completely track wafers processing and sensor fabrication, accountability. The FBK Facility is certified 9001:2015, and most of the information yearly examined by the ISO auditors are managed in FabLIMS. Recently, FBK started to collaborate within iEntrance PNRR RI to test FabLIMS as centralized platform to manage iEntrance equipment and as eHub to transfer equipment, process and experiment data and metadata to the NOMAD platform, to share research output on a well-known FAIR repository, already widely used by material scientists.