In the talk, ongoing activities on 3D processes will be presented. FBK is actively involved in the realization of detectors with RD53 and CROC designs for both ATLAS and CMS experiments. The latest developments and parametric measurements with Temporary Metal for these processes will be discussed. Additionally, FBK is continuing the development of 3D sensors based on trenches. Due to their geometry, these sensors are considered candidates for achieving excellent temporal resolutions along with high damage resistance. In the AIDA Innova project, FBK is producing a batch, and the main characteristics of this batch will be highlighted.
Status of the 3D Silicon Detectors activities at FBK
RONCHIN, Sabina
;PARELLADA MONREAL, Laura;BOSCARDIN, Maurizio;CENTIS VIGNALI, Matteo;FICORELLA, Francesco;HAMMAD ALI, Omar
2024-01-01
Abstract
In the talk, ongoing activities on 3D processes will be presented. FBK is actively involved in the realization of detectors with RD53 and CROC designs for both ATLAS and CMS experiments. The latest developments and parametric measurements with Temporary Metal for these processes will be discussed. Additionally, FBK is continuing the development of 3D sensors based on trenches. Due to their geometry, these sensors are considered candidates for achieving excellent temporal resolutions along with high damage resistance. In the AIDA Innova project, FBK is producing a batch, and the main characteristics of this batch will be highlighted.File in questo prodotto:
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