The electronic structure of C films deposited by sputtering a graphite target in rf. Ar–H2 plasma is investigated by photoemission, Auger emission and electron energy loss spectroscopy (EELS) as a function of the H2 concentration in the feed gas, referred to as [H2]. Adding hydrogen to the plasma causes the films to change from a graphite-like unhydrogenated structure to a non-graphitic hydrogenated structure. The film mass density, as derived from the plasmon energy, decreases upon H2 addition to the gas mixture, goes through a minimum at low [H2] and increases with increasing [H2]. It reveals a non-monotonous behavior of the film H content as a function of [H2], the maximum H incorporation occurring at low [H2]. This appears to be a characteristic of C deposition via graphite sputtering in Ar–H2 plasma and it is discussed in connection with previous results on the subject.

The electronic structure of carbon films deposited in rf argon–hydrogen plasma

Calliari, Lucia;Filippi, Massimiliano;Bensaada Laidani, Nadhira;Anderle, Mariano
2006-01-01

Abstract

The electronic structure of C films deposited by sputtering a graphite target in rf. Ar–H2 plasma is investigated by photoemission, Auger emission and electron energy loss spectroscopy (EELS) as a function of the H2 concentration in the feed gas, referred to as [H2]. Adding hydrogen to the plasma causes the films to change from a graphite-like unhydrogenated structure to a non-graphitic hydrogenated structure. The film mass density, as derived from the plasmon energy, decreases upon H2 addition to the gas mixture, goes through a minimum at low [H2] and increases with increasing [H2]. It reveals a non-monotonous behavior of the film H content as a function of [H2], the maximum H incorporation occurring at low [H2]. This appears to be a characteristic of C deposition via graphite sputtering in Ar–H2 plasma and it is discussed in connection with previous results on the subject.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11582/3526
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