Electrostatically actuated microelectromechanical system (MEMS) switches with fixed- fixed beams were fabricated. FEM modeling was used to calculate the contributions of stress in the fabricated beams from the measured values of pull-in voltage. The reported study provides useful guidelines to optimize the design of fixed-fixed beams, in order to reduce the stress contributions for the successful development of efficient and reliable electrostatically actuated MEMS devices.
Pull-In Voltage and Stress in Fixed-Fixed Beams of RF MEMS Switches
Girolamo Tagliapietra;Jacopo Iannacci;Alvise Bagolini;
2024-01-01
Abstract
Electrostatically actuated microelectromechanical system (MEMS) switches with fixed- fixed beams were fabricated. FEM modeling was used to calculate the contributions of stress in the fabricated beams from the measured values of pull-in voltage. The reported study provides useful guidelines to optimize the design of fixed-fixed beams, in order to reduce the stress contributions for the successful development of efficient and reliable electrostatically actuated MEMS devices.File in questo prodotto:
| File | Dimensione | Formato | |
|---|---|---|---|
|
proceedings-97-00174.pdf
accesso aperto
Tipologia:
Documento in Post-print
Licenza:
PUBBLICO - Creative Commons 3.6
Dimensione
658.06 kB
Formato
Adobe PDF
|
658.06 kB | Adobe PDF | Visualizza/Apri |
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
