Demonstration of 200-, 100-, and 50-$mu$ m Pitch Resistive AC-Coupled Silicon Detectors (RSD) With 100% Fill-Factor for 4D Particle Tracking

We simulated, designed, produced, and tested RSD (Resistive AC-Coupled Silicon Detectors) devices, an evolution of the standard LGAD (Low-Gain Avalanche Diode) technology where a resistive n-type implant and a coupling dielectric layer have been implemented. The first feature works as a resistive sheet, freezing the multiplied charges, while the second one acts as a capacitive coupling for readout pads. We succeeded in the challenging goal of obtaining very fine pitch (50, 100, and 200 um) while maintaining the signal waveforms suitable for high timing performances, as in the standard LGAD-based devices.