We report on the 3-year INFN ATLAS–CMS joint research activity in collaboration with FBK, started in 2014, and aimed at the development of new thin pixel detectors for the High Luminosity LHC Phase-2 upgrades. The program is concerned with both 3D and planar active-edge pixel sensors to be made on 6” p-type wafers. The technology and the design will be optimized and qualified for extreme radiation hardness (2×10e16 neq cm−2). Pixel layouts compatible with present (for testing) and future (RD53 65 nm) front-end chips of ATLAS and CMS are considered. The paper covers the main aspects of the research program, from the sensor design and fabrication technology, to the results of initial tests performed on the first prototypes.
The INFN–FBK “Phase-2” R&D program
Boscardin, Maurizio;Giacomini, Gabriele;Mendicino, Roberto;Ronchin, Sabina;Sultan, DMS;Zorzi, Nicola
2016-01-01
Abstract
We report on the 3-year INFN ATLAS–CMS joint research activity in collaboration with FBK, started in 2014, and aimed at the development of new thin pixel detectors for the High Luminosity LHC Phase-2 upgrades. The program is concerned with both 3D and planar active-edge pixel sensors to be made on 6” p-type wafers. The technology and the design will be optimized and qualified for extreme radiation hardness (2×10e16 neq cm−2). Pixel layouts compatible with present (for testing) and future (RD53 65 nm) front-end chips of ATLAS and CMS are considered. The paper covers the main aspects of the research program, from the sensor design and fabrication technology, to the results of initial tests performed on the first prototypes.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
