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Studies of plasma surface interactions during short time plasma etching of 193 and 248 nm photoresist materials
2006-01-01 X., Hua; S., Engelmann; G. S., Oehrlein; P., Jang; Lazzeri, Paolo; Iacob, Erica; Anderle, Mariano
Study of the discharge gas trapping during thin film growth
2001-01-01 S., Amorosi; Anderle, Mariano; C., Benvenuti; S., Calatroni; J., Carver; H., Neupert; P., Chiggiato; W., Vollenberg
Surface Study of Perfluoropolyether-Urethane Crosslinked Polymers
2000-01-01 S., Turri; S., Radice; Canteri, Roberto; Speranza, Giorgio; Anderle, Mariano
The C1s core line in irradiated graphite
2007-01-01 Speranza, Giorgio; Minati, Luca; Anderle, Mariano
The electronic structure of carbon films deposited in rf argon–hydrogen plasma
2006-01-01 Calliari, Lucia; Filippi, Massimiliano; Bensaada Laidani, Nadhira; Anderle, Mariano
Thin Film Transformations and Volatile Products in the Formation of Nanoporous Low-K PMSSQ-based Dielectric
2005-01-01 Lazzeri, Paolo; Vanzetti, Lia Emanuela; Anderle, Mariano; Bersani, Massimo; J. J., Park; Z., Lin; R. M., Briber; G. W., Rubloff; H. C., Kim; R. D., Miller
To-F-SIMS and XPS characterization of urban aerosols for pollution studies
2003-01-01 Lazzeri, Paolo; G., Clauser; E., Jacob; Lui, Alberto; G., Toninandel; Anderle, Mariano
Tof-SIMS and XPS surface characterization of novel perfluoropolyether-urethane ionomers from aqueous dispersions
2003-01-01 Canteri, Roberto; Speranza, Giorgio; Anderle, Mariano; S., Turri; S., Radice
ToF-SIMS studies of nanoporous PMSSQ materials: Kinetics and reactions in the processing of low-K dielectrics for ULSI applications
2004-01-01 Lazzeri, Paolo; G. W., Rubloff; Vanzetti, Lia Emanuela; R. M., Briber; Anderle, Mariano; Bersani, Massimo; H. J. J., Park; C., Kim; W., Volksen; R. D., Miller; Z., Lin
Topography induced by sputtering in a magnetic sector instrument: an AFM and SEM study
2004-01-01 Iacob, Erica; Bersani, Massimo; A., Lui; Giubertoni, Damiano; Barozzi, Mario; Anderle, Mariano
| Titolo | Data di pubblicazione | Autore(i) | File |
|---|---|---|---|
| Studies of plasma surface interactions during short time plasma etching of 193 and 248 nm photoresist materials | 1-gen-2006 | X., Hua; S., Engelmann; G. S., Oehrlein; P., Jang; Lazzeri, Paolo; Iacob, Erica; Anderle, Mariano | |
| Study of the discharge gas trapping during thin film growth | 1-gen-2001 | S., Amorosi; Anderle, Mariano; C., Benvenuti; S., Calatroni; J., Carver; H., Neupert; P., Chiggiato; W., Vollenberg | |
| Surface Study of Perfluoropolyether-Urethane Crosslinked Polymers | 1-gen-2000 | S., Turri; S., Radice; Canteri, Roberto; Speranza, Giorgio; Anderle, Mariano | |
| The C1s core line in irradiated graphite | 1-gen-2007 | Speranza, Giorgio; Minati, Luca; Anderle, Mariano | |
| The electronic structure of carbon films deposited in rf argon–hydrogen plasma | 1-gen-2006 | Calliari, Lucia; Filippi, Massimiliano; Bensaada Laidani, Nadhira; Anderle, Mariano | |
| Thin Film Transformations and Volatile Products in the Formation of Nanoporous Low-K PMSSQ-based Dielectric | 1-gen-2005 | Lazzeri, Paolo; Vanzetti, Lia Emanuela; Anderle, Mariano; Bersani, Massimo; J. J., Park; Z., Lin; R. M., Briber; G. W., Rubloff; H. C., Kim; R. D., Miller | |
| To-F-SIMS and XPS characterization of urban aerosols for pollution studies | 1-gen-2003 | Lazzeri, Paolo; G., Clauser; E., Jacob; Lui, Alberto; G., Toninandel; Anderle, Mariano | |
| Tof-SIMS and XPS surface characterization of novel perfluoropolyether-urethane ionomers from aqueous dispersions | 1-gen-2003 | Canteri, Roberto; Speranza, Giorgio; Anderle, Mariano; S., Turri; S., Radice | |
| ToF-SIMS studies of nanoporous PMSSQ materials: Kinetics and reactions in the processing of low-K dielectrics for ULSI applications | 1-gen-2004 | Lazzeri, Paolo; G. W., Rubloff; Vanzetti, Lia Emanuela; R. M., Briber; Anderle, Mariano; Bersani, Massimo; H. J. J., Park; C., Kim; W., Volksen; R. D., Miller; Z., Lin | |
| Topography induced by sputtering in a magnetic sector instrument: an AFM and SEM study | 1-gen-2004 | Iacob, Erica; Bersani, Massimo; A., Lui; Giubertoni, Damiano; Barozzi, Mario; Anderle, Mariano |
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Opzioni
Scopri
Tipologia
- 1 Contributo su Rivista 91
- 1 Contributo su Rivista::1.1 Arti... 91
Data di pubblicazione
- 2010 - 2013 4
- 2000 - 2009 61
- 1990 - 1999 17
- 1984 - 1989 9
Editore
- Elsevier 22
- Wiley 6
- American Institute of Physics 5
- Springer 4
- AVS 3
- American Physical Society 2
- IOP Publishing 2
- ACS Publications 1
- Electrochemical Society 1
- IEEE 1
Rivista
- JOURNAL OF VACUUM SCIENCE & TECHN... 10
- APPLIED SURFACE SCIENCE 8
- DIAMOND AND RELATED MATERIALS 8
- NUCLEAR INSTRUMENTS & METHODS IN ... 6
- SURFACE AND INTERFACE ANALYSIS 6
- THIN SOLID FILMS 4
- APPLIED PHYSICS LETTERS 3
- JOURNAL OF MATERIALS SCIENCE 3
- JOURNAL OF APPLIED PHYSICS 2
- JOURNAL OF PHYSICS. CONDENSED MATTER 2
Keyword
- BIOSUPERFICI 4
- ToF-SIMS 4
- amorphous hydrogenated carbon 3
- hardness 3
- mechanical properties 3
- structure 3
- arsenic implant 2
- carbon 2
- diamond-like carbon 2
- laser ablation 2
Lingua
- eng 80
Accesso al fulltext
- no fulltext 86
- reserved 5