Complementary metal-oxide-semiconductor-compatible tunable Fabry–Pe´rot microcavities filled with liquid crystals ~LCs! were realized and studied in the near-infrared region. The microcavities were produced by chip bonding technique, which allows one to infill LC between two @SiO2 /Si#3l/4 (l51.5mm) dielectric Bragg reflectors separated by 950-nm-thick SiO2 posts. Liquid crystals with positive and negative dielectric anisotropy were used, i.e. MerckE7 ~De513.8! and Merck-6608 LC ~De524.2!. Mirror-integrated electrodes allow an external bias to induce an electric field and to tune the LC properties and, hence, the microcavity resonance. Electric-field-induced shifts of the second-order cavity modes of 127 and 49 nm were obtained for Merck-E7 and Merck-6608 LC, with driving potentials of 5 and 10 V, respectively.
Silicon-based near-infrared tunable filters filled with positive or negative dielectric anisotropic liquid crystals
Pucker, Georg;Crivellari, Michele;Bellutti, Pierluigi;Lui, Alberto;
2004-01-01
Abstract
Complementary metal-oxide-semiconductor-compatible tunable Fabry–Pe´rot microcavities filled with liquid crystals ~LCs! were realized and studied in the near-infrared region. The microcavities were produced by chip bonding technique, which allows one to infill LC between two @SiO2 /Si#3l/4 (l51.5mm) dielectric Bragg reflectors separated by 950-nm-thick SiO2 posts. Liquid crystals with positive and negative dielectric anisotropy were used, i.e. MerckE7 ~De513.8! and Merck-6608 LC ~De524.2!. Mirror-integrated electrodes allow an external bias to induce an electric field and to tune the LC properties and, hence, the microcavity resonance. Electric-field-induced shifts of the second-order cavity modes of 127 and 49 nm were obtained for Merck-E7 and Merck-6608 LC, with driving potentials of 5 and 10 V, respectively.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
