The initial stages of hydrogenated amorphous carbon films growth are investigated by in situ and ex situ X-ray reflectivity (XRR) at a wavelength of 1.54 Å. Hydrogenated amorphous carbon films were deposited by rf-plasma-assisted chemical vapor deposition. The results are considered in connection with the main models of film growth, namely, layer-by-layer or island (hemispherical, cylindrical) formation. It is shown that the film density increases at the initial stages of growth and different possible reasons for this are discussed
X-ray reflectivity study of the early stages of a-C:H film growth
Calliari, Lucia;Baranov, Alexandr;
2005-01-01
Abstract
The initial stages of hydrogenated amorphous carbon films growth are investigated by in situ and ex situ X-ray reflectivity (XRR) at a wavelength of 1.54 Å. Hydrogenated amorphous carbon films were deposited by rf-plasma-assisted chemical vapor deposition. The results are considered in connection with the main models of film growth, namely, layer-by-layer or island (hemispherical, cylindrical) formation. It is shown that the film density increases at the initial stages of growth and different possible reasons for this are discussedFile in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
