In the past few years we have developed a technological process allowing for the fabrication of radiation detectors with integrated electronics on high-resistivity silicon substrates. We report on some recent results relevant to the process optimisation and to device/circuit characterization.
Recent results from the development of silicon detectors with integrated electronics
Dalla Betta, Gian Franco;Boscardin, Maurizio;Gregori, Paolo;Piemonte, Claudio;Rachevskaia, Irina;Ratti, Lodovico;Ronchin, Sabina;Zorzi, Nicola
2004-01-01
Abstract
In the past few years we have developed a technological process allowing for the fabrication of radiation detectors with integrated electronics on high-resistivity silicon substrates. We report on some recent results relevant to the process optimisation and to device/circuit characterization.File in questo prodotto:
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