In this paper we report on Force Modulation Microscopy (FMM) study and force-distance curve analysis of porous silicon layers grown on silicon. The characterization has been carried out on the cross section of porous silicon. The FMM images allowed us to investigate the morphological thickness of the layers through local elasticity differences resolving both between porous silicon layers of different porosities and between porous silicon and silicon itself. Force-distance curves showed different adhesion behavior: porous silicon is more hydrophobic than bulk silicon in cross sectional view.

Force modulation microscopy of multilayered porous silicon samples

Ghulinyan, Mher;
2005

Abstract

In this paper we report on Force Modulation Microscopy (FMM) study and force-distance curve analysis of porous silicon layers grown on silicon. The characterization has been carried out on the cross section of porous silicon. The FMM images allowed us to investigate the morphological thickness of the layers through local elasticity differences resolving both between porous silicon layers of different porosities and between porous silicon and silicon itself. Force-distance curves showed different adhesion behavior: porous silicon is more hydrophobic than bulk silicon in cross sectional view.
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11582/20050
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