A CAD system, which makes use of an ad hoc technology [ISFET/CMNOS (ionsensitive field-effect transistor/complementary metal nitride-oxide semiconductor) technology] for fabricating ISFET-based microsystems, has been developed. This technology combines ISFET fabrication technology and CMOS IC processes. To test it, we designed and built a microsystem consisting of three blocks (sensor, amplifier, and test structures) which allows us to check the electrochemical characteristics of the ISFET-based sensor, to evaluate the response of the microsystem under different measurement conditions, and to extract the parameters for BIOSPICE. The extraction of electrical and chemical parameters necessary to simulate the sensor behavior and to optimize the circuit design represents the basic and fundamental link between design and manufacturing. The CAD system developed can be considered a general purpose tool for designing integrated and ` intelligent` sensing probes based on ISFET sensors. Similar microsystems can be used for any biomedical, environmental and biotechnological applications where slight variations around a static pH value are expected and miniaturization is required
A CAD System for Developing Chemical Sensor-Based Microsystems with an ISFET-CMOS Compatible Technology
Lorenzelli, Leandro;Margesin, Benno;Lui, Alberto
1999-01-01
Abstract
A CAD system, which makes use of an ad hoc technology [ISFET/CMNOS (ionsensitive field-effect transistor/complementary metal nitride-oxide semiconductor) technology] for fabricating ISFET-based microsystems, has been developed. This technology combines ISFET fabrication technology and CMOS IC processes. To test it, we designed and built a microsystem consisting of three blocks (sensor, amplifier, and test structures) which allows us to check the electrochemical characteristics of the ISFET-based sensor, to evaluate the response of the microsystem under different measurement conditions, and to extract the parameters for BIOSPICE. The extraction of electrical and chemical parameters necessary to simulate the sensor behavior and to optimize the circuit design represents the basic and fundamental link between design and manufacturing. The CAD system developed can be considered a general purpose tool for designing integrated and ` intelligent` sensing probes based on ISFET sensors. Similar microsystems can be used for any biomedical, environmental and biotechnological applications where slight variations around a static pH value are expected and miniaturization is requiredI documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
