We present the fabrication and characterization of opto-mechanical micro-resonators developed to detect radiation-pressure coupling between light and a macroscopic body. The major achievements of this work are the development of complex high aspect ratio shapes by using the deep-RIE Bosch process and the integration of a high-reflectivity dielectric mirror. The micro-resonators were used as an end-mirror of a Fabry–Perot cavity, attaining an optical finesse of about 6 × 104, and at cryogenic temperature (about 10 K) we measured a mechanical quality factor up to 2 × 106 at about 90 kHz. These features make our devices particularly suitable for experiments on quantum-opto-mechanics.

Fabrication of low loss MOMS resonators for quantum optics experiments

Serra, Enrico;Bagolini, Alvise;Boscardin, Maurizio;Bonaldi, Michele
2013

Abstract

We present the fabrication and characterization of opto-mechanical micro-resonators developed to detect radiation-pressure coupling between light and a macroscopic body. The major achievements of this work are the development of complex high aspect ratio shapes by using the deep-RIE Bosch process and the integration of a high-reflectivity dielectric mirror. The micro-resonators were used as an end-mirror of a Fabry–Perot cavity, attaining an optical finesse of about 6 × 104, and at cryogenic temperature (about 10 K) we measured a mechanical quality factor up to 2 × 106 at about 90 kHz. These features make our devices particularly suitable for experiments on quantum-opto-mechanics.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11582/174610
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