Etch-front-attack angle is measured to be 24°. Generalized empirical formulas are also discussed for these compensation structures for TMAH–water solution. 1 1 0 square structure protects mesa and convex corner and is the most space efficient compared to other compensation structures, but unable to produce perfect convex corner as 1 0 0 bar type structures. Both the 1 0 0 bar structures provide perfect convex corners, but 1 0 0 wide bar structure is more space efficient than the 1 0 0 thin bar structure. Implications of these compensation structures with realization of accelerometer structure have also been discussed. A modified quad beam accelerometer structure has been realized with these compensation structures using 25 wt% TMAH.

Experimental study and analysis of corner compensation structures for CMOS compatible bulk micromachining using 25wt% TMAH

Bagolini, Alvise;Lorenzelli, Leandro;Zen, Mario
2011

Abstract

Etch-front-attack angle is measured to be 24°. Generalized empirical formulas are also discussed for these compensation structures for TMAH–water solution. 1 1 0 square structure protects mesa and convex corner and is the most space efficient compared to other compensation structures, but unable to produce perfect convex corner as 1 0 0 bar type structures. Both the 1 0 0 bar structures provide perfect convex corners, but 1 0 0 wide bar structure is more space efficient than the 1 0 0 thin bar structure. Implications of these compensation structures with realization of accelerometer structure have also been discussed. A modified quad beam accelerometer structure has been realized with these compensation structures using 25 wt% TMAH.
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11582/17389
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