Etch-front-attack angle is measured to be 24°. Generalized empirical formulas are also discussed for these compensation structures for TMAH–water solution. 1 1 0 square structure protects mesa and convex corner and is the most space efficient compared to other compensation structures, but unable to produce perfect convex corner as 1 0 0 bar type structures. Both the 1 0 0 bar structures provide perfect convex corners, but 1 0 0 wide bar structure is more space efficient than the 1 0 0 thin bar structure. Implications of these compensation structures with realization of accelerometer structure have also been discussed. A modified quad beam accelerometer structure has been realized with these compensation structures using 25 wt% TMAH.
Experimental study and analysis of corner compensation structures for CMOS compatible bulk micromachining using 25wt% TMAH
Bagolini, Alvise;Lorenzelli, Leandro;Zen, Mario
2011-01-01
Abstract
Etch-front-attack angle is measured to be 24°. Generalized empirical formulas are also discussed for these compensation structures for TMAH–water solution. 1 1 0 square structure protects mesa and convex corner and is the most space efficient compared to other compensation structures, but unable to produce perfect convex corner as 1 0 0 bar type structures. Both the 1 0 0 bar structures provide perfect convex corners, but 1 0 0 wide bar structure is more space efficient than the 1 0 0 thin bar structure. Implications of these compensation structures with realization of accelerometer structure have also been discussed. A modified quad beam accelerometer structure has been realized with these compensation structures using 25 wt% TMAH.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
