We report on the development of a fabrication technology for double-sided, AC-coupled silicon microstrip detectors for tracking applications. Two batches of detectors with good electrical figures and a low defect rate were successfully manufactured at IRST Laboratory. The processing techniques and the experimental results obtained from these detector prototypes are presented and discussed.
Development of a fabrication technology for double-sided AC-coupled silicon microstrip detectors
Dalla Betta, Gian Franco;Boscardin, Maurizio;Rachevskaia, Irina;Zen, Mario;Zorzi, Nicola
2001-01-01
Abstract
We report on the development of a fabrication technology for double-sided, AC-coupled silicon microstrip detectors for tracking applications. Two batches of detectors with good electrical figures and a low defect rate were successfully manufactured at IRST Laboratory. The processing techniques and the experimental results obtained from these detector prototypes are presented and discussed.File in questo prodotto:
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