We report on the development of a fabrication technology for n-on-n silicon pixel detectors oriented to the ATLAS experiment at LHC. The main processing issues and some selected results from the electrical characterization of detector prototypes and related test structures are presented and discussed.
Fabrication of ATLAS pixel detector prototypes at IRST
Boscardin, Maurizio;Dalla Betta, Gian Franco;Gregori, Paolo;Zen, Mario;Zorzi, Nicola
2001-01-01
Abstract
We report on the development of a fabrication technology for n-on-n silicon pixel detectors oriented to the ATLAS experiment at LHC. The main processing issues and some selected results from the electrical characterization of detector prototypes and related test structures are presented and discussed.File in questo prodotto:
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