We report developing a SnO2 thick-film gas sensor deposited by screen printing onto a micromachined dielectric stacked membrane equipped with an embedded polysilicon microheater and two resistors for temperature measurement. The microheaters were designed to enable an operating temperature of 400°C at about 30 mW power consumption. A newly developed scheme for temperature measurement was adopted for on-line adjustment of the film temperature through a conventional low-power feedback circuit. The electrical response of the prototypes to CO and CH4 is discussed, and their performance is compared to traditional devices fabricated via thick-film methods.
Gas-Sensing Device implemented on a Micromachined Membrane: a Combination of Thick-Film and VLSI Technologies
Guarnieri, Vittorio;Margesin, Benno;Giacomozzi, Flavio;Zen, Mario;Soncini, Giovanni;
2000-01-01
Abstract
We report developing a SnO2 thick-film gas sensor deposited by screen printing onto a micromachined dielectric stacked membrane equipped with an embedded polysilicon microheater and two resistors for temperature measurement. The microheaters were designed to enable an operating temperature of 400°C at about 30 mW power consumption. A newly developed scheme for temperature measurement was adopted for on-line adjustment of the film temperature through a conventional low-power feedback circuit. The electrical response of the prototypes to CO and CH4 is discussed, and their performance is compared to traditional devices fabricated via thick-film methods.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
