In this paper, we present a continuously tunable phase shifter realized in MEMS technology. Varactors with liquid crystal as a tunable dielectric layer underneath gold bridges are used to build a loaded line phase shifter. Measurements show that the phase shifter has a differential phase shift of 928, a figure of merit (FoM) of 428/dB and an input matching of 219 dB at 76 GHz.The tuning speed of the phase shifter is measured at different temperatures between 10 and 508C. The realized phase shifter can be used in combination with MEMS switches in order to build a 3608 tunable reflection phase shifter.
Advanced characterization of a W-band phase shifter based on liquid crystals and MEMS technology
Giacomozzi, Flavio;Colpo, Sabrina;
2012-01-01
Abstract
In this paper, we present a continuously tunable phase shifter realized in MEMS technology. Varactors with liquid crystal as a tunable dielectric layer underneath gold bridges are used to build a loaded line phase shifter. Measurements show that the phase shifter has a differential phase shift of 928, a figure of merit (FoM) of 428/dB and an input matching of 219 dB at 76 GHz.The tuning speed of the phase shifter is measured at different temperatures between 10 and 508C. The realized phase shifter can be used in combination with MEMS switches in order to build a 3608 tunable reflection phase shifter.File in questo prodotto:
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