Sfoglia per Autore
Highly Sensitive Detection of Inorganic Contamination
2008-01-01 Burkhard, Beckhoff; Andreas, Nutsch; Roswitha, Altmann; G., Borionetti; C., Pello; Maria Luisa, Polignano; Davide, Codegoni; Salvo, Grasso; Elena, Cazzini; Bersani, Massimo; Lazzeri, Paolo; Gennaro, Salvatore; Michael, Kolbe; Matthias, Müller; P., Kregsamer; Florian, Posch
Characterization of junction activation and deactivation using non-equilibrium annealing: Solid phase epitaxy, spike annealing, laser annealing
2009-01-01 Bersani, Massimo; Pepponi, Giancarlo; Giubertoni, Damiano; Gennaro, Salvatore; Mehmet, Sahiner; Stephen, Kelty; Max, Kah; K. J., Kirkby; Roisin, Doherty; Majeed, Foad; Meirer, Florian; Christina, Streli; Joseph, Woicik; P., Pianetta
Multi-technique characterization of arsenic ultra shallow junctions in silicon within the ANNA consortium
2009-01-01 Giubertoni, Damiano; Pepponi, Giancarlo; Burkhard, Beckhoff; P., Hoenicke; Gennaro, Salvatore; Meirer, Florian; Deieter, Ingerle; Georg, Steinhauser; Miklos, Fried; P., Petrik; A., Parisini; M., Reading; Christina, Streli; Jaap van den, Berg; Bersani, Massimo
Multi-technique characterization of arsenic ultra shallow junctions in silicon within the ANNA consortium.
2009-01-01 Giubertoni, Damiano; Pepponi, Giancarlo; B., Beckhoff; P., Hoenicke; Gennaro, Salvatore; Meirer, Florian; D., Ingerle; G., Steinhauser; M., Fried; P., Petrik; A., Parisini; M. A., Reading; C., Streli; J. A., van den Berg; Bersani, Massimo
UNUSUAL FE-RICH FRAMBOIDS from DEVONIAN CARBONATE MOUNDS (HAMAR LAGHDAD RIDGE, MOROCCO) INVESTIGATED BY HR-SEM and ToF-SIMS: FOSSIL OAM-SRB CONSORTIA ANALOGUES?
2009-01-01 B., Cavalazzi; R., Barbieri; G. G., Ori; F., Westall; Gennaro, Salvatore; Lui, Alberto; Canteri, Roberto; Bersani, Massimo; Lazzeri, Paolo; Pepponi, Giancarlo; F., Gamberini
UNUSUAL FE-RICH FRAMBOIDS FROM DEVONIAN CARBONATE MOUNDS (SAHARA DESERT, MOROCCO) INVESTIGATED BY HR-SEM AND TOF-SIMS: FOSSIL ANALOGUES OF MOA-SRB CONSORTIA?
2009-01-01 B., Cavalazzi; R., Barbieri; G. G., Ori; F., Westall; S. L., Cady; Gennaro, Salvatore; Lui, Alberto; Canteri, Roberto; Bersani, Massimo; Lazzeri, Paolo; Pepponi, Giancarlo
Ultra low energy Boron implants in silicon characterization by not-oxidizing secondary ion mass spectrometry analysis and soft-ray grazing incidence x-ray fluorescence techniques.
2009-01-01 Giubertoni, Damiano; Pepponi, Giancarlo; P., Hoenicke; B., Beckhoff; Iacob, Erica; Gennaro, Salvatore; Bersani, Massimo
Multi-technique characterization of arsenic and boron ultra low energy implants in silicon within the ANNA consortium.
2009-01-01 Giubertoni, Damiano; Pepponi, Giancarlo; B., Beckhoff; P., Hoenicke; Gennaro, Salvatore; Meirer, Florian; D., Ingerle; G., Steinhauser; M., Fried; P., Petrik; A., Parisini; M. A., Reading; C., Streli; J. A., van den Berg; Bersani, Massimo
Deactivation of sub-melt laser annealed arsenic ultra shallow junctions in silicon during subsequent thermal treatment
2009-01-01 Giubertoni, Damiano; Pepponi, Giancarlo; M. A., Sahiner; S. P., Kelty; M., Kah; K. J., Kirkby; Meirer, Florian; Gennaro, Salvatore; R., Doherty; M. A., Foad; J. C., Woicik; C., Streli; Bersani, Massimo; P., Pianetta
Characterization of Junction Activation and Deactivation Using non-Equilibrium
2009-01-01 Bersani, Massimo; Pepponi, Giancarlo; Giubertoni, Damiano; Gennaro, Salvatore; M. A., Sahiner; S. P., Kelty; M., Kah; K. J., Kirkby; R., Doherty; M. A., Foad; Meirer, Florian; C., Streli; J. C., Woicik; P., Piane
Highly sensitive detection of inorganic contamination
2009-01-01 B., Beckhoff; A., Nutsch; R., Altmann; G., Borionetti; C., Pello; M. L., Polignano; D., Codegoni; S., Grasso; E., Cazzini; Bersani, Massimo; Lazzeri, Paolo; Gennaro, Salvatore; M., Kolbe; M., Mueller; P., Kregsamer; F., Posch
Ultralow energy boron implants in silicon characterization by nonoxidizing secondary ion mass spectrometry analysis and soft x-ray grazing incidence x-ray fluorescence techniques
2010-01-01 Giubertoni, Damiano; Iacob, Erica; P., Hoenicke; B., Beckhoff; Pepponi, Giancarlo; Gennaro, Salvatore; Bersani, Massimo
Deactivation of submelt laser annealed arsenic ultrashallow junctions in silicon during subsequent thermal treatment
2010-01-01 Giubertoni, Damiano; Pepponi, Giancarlo; Mehmet Alper, Sahiner; Stephen P., Kelty; Gennaro, Salvatore; Bersani, Massimo; Max, Kah; Karen J., Kirkby; Roisin, Doherty; Majeed A., Foad; Meirer, Florian; C., Streli; Joseph C., Woicik; Piero, Pianetta
High performance n+/p and p+/n germanium diodes at low-temperature activation annealing
2011-01-01 V., Ioannou Sougleridis; S. F., Galata; E., Golias; T., Speliotis; A., Dimoulas; Giubertoni, Damiano; Gennaro, Salvatore; Barozzi, Mario
Tapered walls via holes manufactured using DRIE variable isotropy process
2011-01-01 Vasilache, Dan Adrian; Resta, Giuseppe; Ronchin, Sabina; Colpo, Sabrina; Margesin, Benno; Giacomozzi, Flavio; Gennaro, Salvatore
Development of nano-roughness under SIMS ion sputtering of Germanium surfaces
2011-01-01 Iacob, Erica; Barozzi, Mario; Demenev, Evgeny; Gennaro, Salvatore; Giubertoni, Damiano; Bersani, Massimo
ToF-SIMS and TXM analysis of ancient ceramics
2011-01-01 Gennaro, Salvatore; Meirer, Florian; Pepponi, Giancarlo; Bersani, Massimo; Y., Liu; A., Mehta; J. C., Andrews; P., Pianetta
Structural Analysis and Depth Profiling of Nanometric SiO2/SRO Multilayers
2011-01-01 Barozzi, Mario; Gennaro, Salvatore; Bersani, Massimo; Vanzetti, Lia Emanuela; Jestin, Yoann; Pucker, Georg; S., Milita; R., Balboni
Tappered walls via holes manufactured using DRIE variable isotropy process
2012-01-01 Vasilache, Dan Adrian; Ronchin, Sabina; Colpo, Sabrina; Margesin, Benno; Giacomozzi, Flavio; Gennaro, Salvatore
Arsenic redistribution after solid phase epitaxial regrowth of shallow pre-amorphized silicon layers
2012-01-01 Demenev, Evgeny; Giubertoni, Damiano; Gennaro, Salvatore; Bersani, Massimo; E., Hourdakis; A. G., Nassiopoulou; M. A., Reading; J. A., van den Berg
| Titolo | Data di pubblicazione | Autore(i) | File |
|---|---|---|---|
| Highly Sensitive Detection of Inorganic Contamination | 1-gen-2008 | Burkhard, Beckhoff; Andreas, Nutsch; Roswitha, Altmann; G., Borionetti; C., Pello; Maria Luisa, Polignano; Davide, Codegoni; Salvo, Grasso; Elena, Cazzini; Bersani, Massimo; Lazzeri, Paolo; Gennaro, Salvatore; Michael, Kolbe; Matthias, Müller; P., Kregsamer; Florian, Posch | |
| Characterization of junction activation and deactivation using non-equilibrium annealing: Solid phase epitaxy, spike annealing, laser annealing | 1-gen-2009 | Bersani, Massimo; Pepponi, Giancarlo; Giubertoni, Damiano; Gennaro, Salvatore; Mehmet, Sahiner; Stephen, Kelty; Max, Kah; K. J., Kirkby; Roisin, Doherty; Majeed, Foad; Meirer, Florian; Christina, Streli; Joseph, Woicik; P., Pianetta | |
| Multi-technique characterization of arsenic ultra shallow junctions in silicon within the ANNA consortium | 1-gen-2009 | Giubertoni, Damiano; Pepponi, Giancarlo; Burkhard, Beckhoff; P., Hoenicke; Gennaro, Salvatore; Meirer, Florian; Deieter, Ingerle; Georg, Steinhauser; Miklos, Fried; P., Petrik; A., Parisini; M., Reading; Christina, Streli; Jaap van den, Berg; Bersani, Massimo | |
| Multi-technique characterization of arsenic ultra shallow junctions in silicon within the ANNA consortium. | 1-gen-2009 | Giubertoni, Damiano; Pepponi, Giancarlo; B., Beckhoff; P., Hoenicke; Gennaro, Salvatore; Meirer, Florian; D., Ingerle; G., Steinhauser; M., Fried; P., Petrik; A., Parisini; M. A., Reading; C., Streli; J. A., van den Berg; Bersani, Massimo | |
| UNUSUAL FE-RICH FRAMBOIDS from DEVONIAN CARBONATE MOUNDS (HAMAR LAGHDAD RIDGE, MOROCCO) INVESTIGATED BY HR-SEM and ToF-SIMS: FOSSIL OAM-SRB CONSORTIA ANALOGUES? | 1-gen-2009 | B., Cavalazzi; R., Barbieri; G. G., Ori; F., Westall; Gennaro, Salvatore; Lui, Alberto; Canteri, Roberto; Bersani, Massimo; Lazzeri, Paolo; Pepponi, Giancarlo; F., Gamberini | |
| UNUSUAL FE-RICH FRAMBOIDS FROM DEVONIAN CARBONATE MOUNDS (SAHARA DESERT, MOROCCO) INVESTIGATED BY HR-SEM AND TOF-SIMS: FOSSIL ANALOGUES OF MOA-SRB CONSORTIA? | 1-gen-2009 | B., Cavalazzi; R., Barbieri; G. G., Ori; F., Westall; S. L., Cady; Gennaro, Salvatore; Lui, Alberto; Canteri, Roberto; Bersani, Massimo; Lazzeri, Paolo; Pepponi, Giancarlo | |
| Ultra low energy Boron implants in silicon characterization by not-oxidizing secondary ion mass spectrometry analysis and soft-ray grazing incidence x-ray fluorescence techniques. | 1-gen-2009 | Giubertoni, Damiano; Pepponi, Giancarlo; P., Hoenicke; B., Beckhoff; Iacob, Erica; Gennaro, Salvatore; Bersani, Massimo | |
| Multi-technique characterization of arsenic and boron ultra low energy implants in silicon within the ANNA consortium. | 1-gen-2009 | Giubertoni, Damiano; Pepponi, Giancarlo; B., Beckhoff; P., Hoenicke; Gennaro, Salvatore; Meirer, Florian; D., Ingerle; G., Steinhauser; M., Fried; P., Petrik; A., Parisini; M. A., Reading; C., Streli; J. A., van den Berg; Bersani, Massimo | |
| Deactivation of sub-melt laser annealed arsenic ultra shallow junctions in silicon during subsequent thermal treatment | 1-gen-2009 | Giubertoni, Damiano; Pepponi, Giancarlo; M. A., Sahiner; S. P., Kelty; M., Kah; K. J., Kirkby; Meirer, Florian; Gennaro, Salvatore; R., Doherty; M. A., Foad; J. C., Woicik; C., Streli; Bersani, Massimo; P., Pianetta | |
| Characterization of Junction Activation and Deactivation Using non-Equilibrium | 1-gen-2009 | Bersani, Massimo; Pepponi, Giancarlo; Giubertoni, Damiano; Gennaro, Salvatore; M. A., Sahiner; S. P., Kelty; M., Kah; K. J., Kirkby; R., Doherty; M. A., Foad; Meirer, Florian; C., Streli; J. C., Woicik; P., Piane | |
| Highly sensitive detection of inorganic contamination | 1-gen-2009 | B., Beckhoff; A., Nutsch; R., Altmann; G., Borionetti; C., Pello; M. L., Polignano; D., Codegoni; S., Grasso; E., Cazzini; Bersani, Massimo; Lazzeri, Paolo; Gennaro, Salvatore; M., Kolbe; M., Mueller; P., Kregsamer; F., Posch | |
| Ultralow energy boron implants in silicon characterization by nonoxidizing secondary ion mass spectrometry analysis and soft x-ray grazing incidence x-ray fluorescence techniques | 1-gen-2010 | Giubertoni, Damiano; Iacob, Erica; P., Hoenicke; B., Beckhoff; Pepponi, Giancarlo; Gennaro, Salvatore; Bersani, Massimo | |
| Deactivation of submelt laser annealed arsenic ultrashallow junctions in silicon during subsequent thermal treatment | 1-gen-2010 | Giubertoni, Damiano; Pepponi, Giancarlo; Mehmet Alper, Sahiner; Stephen P., Kelty; Gennaro, Salvatore; Bersani, Massimo; Max, Kah; Karen J., Kirkby; Roisin, Doherty; Majeed A., Foad; Meirer, Florian; C., Streli; Joseph C., Woicik; Piero, Pianetta | |
| High performance n+/p and p+/n germanium diodes at low-temperature activation annealing | 1-gen-2011 | V., Ioannou Sougleridis; S. F., Galata; E., Golias; T., Speliotis; A., Dimoulas; Giubertoni, Damiano; Gennaro, Salvatore; Barozzi, Mario | |
| Tapered walls via holes manufactured using DRIE variable isotropy process | 1-gen-2011 | Vasilache, Dan Adrian; Resta, Giuseppe; Ronchin, Sabina; Colpo, Sabrina; Margesin, Benno; Giacomozzi, Flavio; Gennaro, Salvatore | |
| Development of nano-roughness under SIMS ion sputtering of Germanium surfaces | 1-gen-2011 | Iacob, Erica; Barozzi, Mario; Demenev, Evgeny; Gennaro, Salvatore; Giubertoni, Damiano; Bersani, Massimo | |
| ToF-SIMS and TXM analysis of ancient ceramics | 1-gen-2011 | Gennaro, Salvatore; Meirer, Florian; Pepponi, Giancarlo; Bersani, Massimo; Y., Liu; A., Mehta; J. C., Andrews; P., Pianetta | |
| Structural Analysis and Depth Profiling of Nanometric SiO2/SRO Multilayers | 1-gen-2011 | Barozzi, Mario; Gennaro, Salvatore; Bersani, Massimo; Vanzetti, Lia Emanuela; Jestin, Yoann; Pucker, Georg; S., Milita; R., Balboni | |
| Tappered walls via holes manufactured using DRIE variable isotropy process | 1-gen-2012 | Vasilache, Dan Adrian; Ronchin, Sabina; Colpo, Sabrina; Margesin, Benno; Giacomozzi, Flavio; Gennaro, Salvatore | |
| Arsenic redistribution after solid phase epitaxial regrowth of shallow pre-amorphized silicon layers | 1-gen-2012 | Demenev, Evgeny; Giubertoni, Damiano; Gennaro, Salvatore; Bersani, Massimo; E., Hourdakis; A. G., Nassiopoulou; M. A., Reading; J. A., van den Berg |
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