Sfoglia per Autore Faes, Alessandro
Microstructures etched in doped TMAH solutions
1999-01-01 Sebastiano, Brida; Faes, Alessandro; Guarnieri, Vittorio; Giacomozzi, Flavio; Margesin, Benno; M., Paranjape; Giorgio Umberto, Pignatel; Zen, Mario
Silicon bulk micromachining for sensor technologies
1999-01-01 Zen, Mario; G., Pignatel; S., Brida; Faes, Alessandro; Ferrario, Lorenza; Guarnieri, Vittorio; Margesin, Benno; G., Soncini
Realisation of Silicon Microcalorimeters with Bulk Micromachining Technology
2000-01-01 Margesin, Benno; Faes, Alessandro; Giorgio Umberto, Pignatel
Microstructures etched in doped TMAH solutions
2000-01-01 S., Brida; Faes, Alessandro; Guarnieri, Vittorio; Giacomozzi, Flavio; Margesin, Benno; M., Paranjape; G., Pignatel; Zen, Mario
Tecnologie micromeccaniche per sensoristica integrata in silicio
2000-01-01 Sebastiano, Brida; Giacomozzi, Flavio; Guarnieri, Vittorio; Ferrario, Lorenza; Margesin, Benno; Zen, Mario; Faes, Alessandro; Giorgio Umberto, Pignatel; Soncini, Giovanni
Vertically structured thin membranes by a lost mold technique
2001-01-01 Sebastiano, Brida; Faes, Alessandro; Ferrario, Lorenza; Guarnieri, Vittorio; Giacomozzi, Flavio; Lui, Alberto; Margesin, Benno; Zen, Mario
Electrochemical effects during anisotropic bulk-silicon etching with doped and undoped TMAHW solutions
2001-01-01 Bellutti, Pierluigi; Sebastiano, Brida; Faes, Alessandro; Guarnieri, Vittorio; Giacomozzi, Flavio; Margesin, Benno; Zen, Mario
Measurements of the mechanical properties of composite membranes by load-deflection method with a profilometer
2002-01-01 Faes, Alessandro; Giacomozzi, Flavio; Guarnieri, Vittorio; Margesin, Benno
Fabrication of a piston-type condenser microphone with structured polysilicon diaphragm
2003-01-01 Margesin, Benno; Faes, Alessandro; Giacomozzi, Flavio; Bagolini, Alvise; Zen, Mario
Progettazione, disegno, fabbricazione e caratterizzazione di un microfono capacitivo in silicio con tecnologie MEMS
2003-01-01 Margesin, Benno; Bagolini, Alvise; Faes, Alessandro; Giacomozzi, Flavio; Guarnieri, Vittorio
Stress Characterization of Silicon Oxide, Silicon Nitride, Chromium and Gold Films for Micromechanics
2003-01-01 Bagolini, Alvise; Margesin, Benno; Guarnieri, Vittorio; Giacomozzi, Flavio; Faes, Alessandro; R., Pal; Decarli, Massimiliano
Novel stress test structures for surface micromachining applications
2003-01-01 Bagolini, Alvise; Margesin, Benno; Faes, Alessandro; G., Turco
Stress characterization of electroplated gold layers for low temperature surface micromachining
2003-01-01 Margesin, Benno; Bagolini, Alvise; Guarnieri, Vittorio; Giacomozzi, Flavio; Faes, Alessandro; Ramjay, Pal; Decarli, Massimiliano
Stress Characterization of Silicon Oxide, Silicon Nitride, Chromium and Gold Films for Micromechanics
2004-01-01 Bagolini, Alvise; Margesin, Benno; Guarnieri, Vittorio; Giacomozzi, Flavio; Faes, Alessandro; R., Pal; Decarli, Massimiliano
Fabrication of silicon bolometers with bulk micromachining technology
2004-01-01 Faes, Alessandro; Giacomozzi, Flavio; Margesin, Benno; A., Nucciotti
Novel Test structures for stress diagnosis in micromechanics
2004-01-01 Bagolini, Alvise; Margesin, Benno; Faes, Alessandro; G., Turco; Giacomozzi, Flavio
Modeling of a Condenser Microphone with Structured Polysilicon Diaphragm
2004-01-01 Faes, Alessandro; Giacomozzi, Flavio; Margesin, Benno; Zen, Mario
A micromachined inertial accelerometer for avionics
2005-01-01 Bagolini, Alvise; Margesin, Benno; Faes, Alessandro; S., Das
A micromachined flow sensor for monitoring and evaluation of urinary disfunction
2005-01-01 Decarli, Massimiliano; Guarnieri, Vittorio; Faes, Alessandro; Margesin, Benno; N., Viarani; Massari, Nicola; Gottardi, Massimo; Simoni, Andrea; M., Paranjape; Zen, Mario
A MEMS-based liquid flow sensor for medical diagnostics
2005-01-01 Decarli, Massimiliano; Guarnieri, Vittorio; Faes, Alessandro; Margesin, Benno; M., Paranjape; Lorenzelli, Leandro; Zen, Mario
Titolo | Data di pubblicazione | Autore(i) | File |
---|---|---|---|
Microstructures etched in doped TMAH solutions | 1-gen-1999 | Sebastiano, Brida; Faes, Alessandro; Guarnieri, Vittorio; Giacomozzi, Flavio; Margesin, Benno; M., Paranjape; Giorgio Umberto, Pignatel; Zen, Mario | |
Silicon bulk micromachining for sensor technologies | 1-gen-1999 | Zen, Mario; G., Pignatel; S., Brida; Faes, Alessandro; Ferrario, Lorenza; Guarnieri, Vittorio; Margesin, Benno; G., Soncini | |
Realisation of Silicon Microcalorimeters with Bulk Micromachining Technology | 1-gen-2000 | Margesin, Benno; Faes, Alessandro; Giorgio Umberto, Pignatel | |
Microstructures etched in doped TMAH solutions | 1-gen-2000 | S., Brida; Faes, Alessandro; Guarnieri, Vittorio; Giacomozzi, Flavio; Margesin, Benno; M., Paranjape; G., Pignatel; Zen, Mario | |
Tecnologie micromeccaniche per sensoristica integrata in silicio | 1-gen-2000 | Sebastiano, Brida; Giacomozzi, Flavio; Guarnieri, Vittorio; Ferrario, Lorenza; Margesin, Benno; Zen, Mario; Faes, Alessandro; Giorgio Umberto, Pignatel; Soncini, Giovanni | |
Vertically structured thin membranes by a lost mold technique | 1-gen-2001 | Sebastiano, Brida; Faes, Alessandro; Ferrario, Lorenza; Guarnieri, Vittorio; Giacomozzi, Flavio; Lui, Alberto; Margesin, Benno; Zen, Mario | |
Electrochemical effects during anisotropic bulk-silicon etching with doped and undoped TMAHW solutions | 1-gen-2001 | Bellutti, Pierluigi; Sebastiano, Brida; Faes, Alessandro; Guarnieri, Vittorio; Giacomozzi, Flavio; Margesin, Benno; Zen, Mario | |
Measurements of the mechanical properties of composite membranes by load-deflection method with a profilometer | 1-gen-2002 | Faes, Alessandro; Giacomozzi, Flavio; Guarnieri, Vittorio; Margesin, Benno | |
Fabrication of a piston-type condenser microphone with structured polysilicon diaphragm | 1-gen-2003 | Margesin, Benno; Faes, Alessandro; Giacomozzi, Flavio; Bagolini, Alvise; Zen, Mario | |
Progettazione, disegno, fabbricazione e caratterizzazione di un microfono capacitivo in silicio con tecnologie MEMS | 1-gen-2003 | Margesin, Benno; Bagolini, Alvise; Faes, Alessandro; Giacomozzi, Flavio; Guarnieri, Vittorio | |
Stress Characterization of Silicon Oxide, Silicon Nitride, Chromium and Gold Films for Micromechanics | 1-gen-2003 | Bagolini, Alvise; Margesin, Benno; Guarnieri, Vittorio; Giacomozzi, Flavio; Faes, Alessandro; R., Pal; Decarli, Massimiliano | |
Novel stress test structures for surface micromachining applications | 1-gen-2003 | Bagolini, Alvise; Margesin, Benno; Faes, Alessandro; G., Turco | |
Stress characterization of electroplated gold layers for low temperature surface micromachining | 1-gen-2003 | Margesin, Benno; Bagolini, Alvise; Guarnieri, Vittorio; Giacomozzi, Flavio; Faes, Alessandro; Ramjay, Pal; Decarli, Massimiliano | |
Stress Characterization of Silicon Oxide, Silicon Nitride, Chromium and Gold Films for Micromechanics | 1-gen-2004 | Bagolini, Alvise; Margesin, Benno; Guarnieri, Vittorio; Giacomozzi, Flavio; Faes, Alessandro; R., Pal; Decarli, Massimiliano | |
Fabrication of silicon bolometers with bulk micromachining technology | 1-gen-2004 | Faes, Alessandro; Giacomozzi, Flavio; Margesin, Benno; A., Nucciotti | |
Novel Test structures for stress diagnosis in micromechanics | 1-gen-2004 | Bagolini, Alvise; Margesin, Benno; Faes, Alessandro; G., Turco; Giacomozzi, Flavio | |
Modeling of a Condenser Microphone with Structured Polysilicon Diaphragm | 1-gen-2004 | Faes, Alessandro; Giacomozzi, Flavio; Margesin, Benno; Zen, Mario | |
A micromachined inertial accelerometer for avionics | 1-gen-2005 | Bagolini, Alvise; Margesin, Benno; Faes, Alessandro; S., Das | |
A micromachined flow sensor for monitoring and evaluation of urinary disfunction | 1-gen-2005 | Decarli, Massimiliano; Guarnieri, Vittorio; Faes, Alessandro; Margesin, Benno; N., Viarani; Massari, Nicola; Gottardi, Massimo; Simoni, Andrea; M., Paranjape; Zen, Mario | |
A MEMS-based liquid flow sensor for medical diagnostics | 1-gen-2005 | Decarli, Massimiliano; Guarnieri, Vittorio; Faes, Alessandro; Margesin, Benno; M., Paranjape; Lorenzelli, Leandro; Zen, Mario |
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