In this work, we focused on the fabrication and characterization of the micro ZnO thin-film gas sensor by using standard MEMS process with EBL, electron beam evaporation, magnetron sputtering and lift-off.
Micro gas sensor device fabrication with ZnO sensing nanofilms by electron beam lithography
Zhifu Feng;Andrea Gaiardo;Alessandro Cian;Damiano Giubertoni;Matteo Valt;Pierluigi Bellutti;
2022-01-01
Abstract
In this work, we focused on the fabrication and characterization of the micro ZnO thin-film gas sensor by using standard MEMS process with EBL, electron beam evaporation, magnetron sputtering and lift-off.File in questo prodotto:
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