Micro-metric hotplates are widely used for gas sensing, microfluidics, flow sensors, and other devices. In order to achieve low power consumption, quick response and high integration, it is critical to develop nano-metric hotplates with nano-size active area heated to obtain the same working temperature as the micro-metric ones. EBL, electron beam evaporation and FIB techniques were used to fabricate 10 х 10 μm2 active area, where a 100nm thick platinum coil circuit was patterned with 1.1μm linewidth, and 500 nm distance between lines. In the first step, EBL was employed to define the micro-size elements with different electon doses at the same energy value, i.e. the contact pads and the active area overall (10 х 10 μm2). Secondly, FIB milling parameters (ion species and doses) were optimised to define the coil circuit by patterning the active area. Meanwhile, the influence of ONO stack thickness on the working temperature and power consumption of nano hotplate has also been calculated in COMSOL.

Nano Hotplate Fabrication by Combining EBL and FIB Techniques

Z. Feng;A. Gaiardo;D. Giubertoni;A. Cian;P. Bellutti;
2021

Abstract

Micro-metric hotplates are widely used for gas sensing, microfluidics, flow sensors, and other devices. In order to achieve low power consumption, quick response and high integration, it is critical to develop nano-metric hotplates with nano-size active area heated to obtain the same working temperature as the micro-metric ones. EBL, electron beam evaporation and FIB techniques were used to fabricate 10 х 10 μm2 active area, where a 100nm thick platinum coil circuit was patterned with 1.1μm linewidth, and 500 nm distance between lines. In the first step, EBL was employed to define the micro-size elements with different electon doses at the same energy value, i.e. the contact pads and the active area overall (10 х 10 μm2). Secondly, FIB milling parameters (ion species and doses) were optimised to define the coil circuit by patterning the active area. Meanwhile, the influence of ONO stack thickness on the working temperature and power consumption of nano hotplate has also been calculated in COMSOL.
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11582/331493
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