Silicon microtechnology for microfluidic

For many application small quantity of fluid have to be transported, mixed or separated. Microfluidic devices can be cheaply fabricated in high volumes by using plastics but for sensing and some kind of processing silicon substrates allow much more potentiality. On chip handling of micro- or pico-liter of fluid on silicon substrate can be obtained using MEMS technology. This presentation reports about the available technology for the fabrication of microfluidic structures and more complex lab on chip devices.