Quantitative information from Grazing Incidence X-Ray Fluorescence Analysis requires a deep knowledge of the instrument and the experimental conditions. These can be derived from the analysis of known stable samples. For this purpose the authors propose the use of common substrates used in microelectronics e.g. Si and Ge wafers due to their quality, availability and relatively low cost compared to certified reference materials.

Instrumental calibration for GIXRF analysis

Brigidi, Fabio;Bortolotti, Mauro;Pepponi, Giancarlo
2013

Abstract

Quantitative information from Grazing Incidence X-Ray Fluorescence Analysis requires a deep knowledge of the instrument and the experimental conditions. These can be derived from the analysis of known stable samples. For this purpose the authors propose the use of common substrates used in microelectronics e.g. Si and Ge wafers due to their quality, availability and relatively low cost compared to certified reference materials.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11582/239219
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