STUDY OF AN ELECTRO-MECHANIC MECHANISM EXPLOITING IN-PLANE ROTATION FOR THE REALIZATION OF TUNEABLE CAPACITORS

In the last years MEMS Switches and related MEM components have encountered a great interest in the technology community for their outstanding intrinsic characteristics. MEMS Switches in particular offer low insertion loss, higher isolation, almost zero power consumption, small size and weight at very low intermodulation distortion, which makes them suitable for many applications. The MEMS technology has demonstrated also to be able to provide potentially high quality components for other passive RF and microwave devices such as capacitors and inductors. In this paper we extend our research activities on MEM technology to the design of tuneable capacitors based with in-plane movement.