In the last few years the creation of functional films on solid substrates has become increasingly attractive in particular with the aim of functioning silicon based-electronic devices with biological molecules. TOF-SIMS is a useful technique to characterize the films at the submicrometer scale because of its surface selectivity and molecular specificity. However the use of TOF-SIMS is limited by the difficulty in the quantification particularly for organic materials. We performed experiments on silicon oxide substrates covered by polysiloxanes to which organic molecules simulating biological molecules («probes») were attached by covalent binding. In the present paper: 1) we show that the fragmentation pattern is dominated by large molecular weight fragments assigned to the probes; 2) we demonstrate by two independent techniques that quantitative information can be extracted from TOF-SIMS data utilising the intensity of the relevant peaks assigned to the probes
Characterization of Functional Films on Solid Substrates by Tof-Sims
Canteri, Roberto;Malacarne, Carla;Anderle, Mariano
1998-01-01
Abstract
In the last few years the creation of functional films on solid substrates has become increasingly attractive in particular with the aim of functioning silicon based-electronic devices with biological molecules. TOF-SIMS is a useful technique to characterize the films at the submicrometer scale because of its surface selectivity and molecular specificity. However the use of TOF-SIMS is limited by the difficulty in the quantification particularly for organic materials. We performed experiments on silicon oxide substrates covered by polysiloxanes to which organic molecules simulating biological molecules («probes») were attached by covalent binding. In the present paper: 1) we show that the fragmentation pattern is dominated by large molecular weight fragments assigned to the probes; 2) we demonstrate by two independent techniques that quantitative information can be extracted from TOF-SIMS data utilising the intensity of the relevant peaks assigned to the probesI documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
