Pointer structures can be useful means to measure the strain of a structural layer in micromachining processes 1, 2: these structures can perform an in-situ diagnosis of the residual stress, both compressive and tensile. Major limitations come from the reduced displacement range that these structures can achieve: this implies a limited sensitivity, often in the range of less than 1μm/50MPa. In order to address this problem a magnification device has been modeled and implemented 3, that allows for larger displacement and consequent higher sensitivity of the pointer. We propose an analytical model of this structure under elastic regime, and compare its results with finite element simulation.
Analytical model for magnified displacement stress test structures.
Bagolini, Alvise;Faes, Alessandro;Margesin, Benno
2005-01-01
Abstract
Pointer structures can be useful means to measure the strain of a structural layer in micromachining processes 1, 2: these structures can perform an in-situ diagnosis of the residual stress, both compressive and tensile. Major limitations come from the reduced displacement range that these structures can achieve: this implies a limited sensitivity, often in the range of less than 1μm/50MPa. In order to address this problem a magnification device has been modeled and implemented 3, that allows for larger displacement and consequent higher sensitivity of the pointer. We propose an analytical model of this structure under elastic regime, and compare its results with finite element simulation.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
