Fabrication and Optical Characterization of 2-dimensional Si3N4 waveguides

We present the fabrication and optical characterization of stoichiometric Silicon Nitride waveguides of different structures on silicon. Stoichiometric silicon nitride is of special interest for planar waveguides in the visible range of light due to the low absorption losses. We investigated the optical properties as a function of wave-guide geometry and fabrication technolog in order to optimize the waveguide performance. In view of the integration of the waveguides within a silicon chip for optical bus applications, we have produced the waveguides within a CMOS fabrication pilot-line