Microelectromechanical (MEM) acceleration sensors are packaged at specifically chosen pressure levels in order to generate a defined viscous damping force on the moving microstructures. This specially designed damping force is crucial for the correct operation of the device [1]. To calculate the pressure levels that correspond to the desired damping force and to evaluate the sensitivity w.r.t. pressure changes, e.g. due to package leakage, the designers need models that allow for the predictive and fast transient simulation of the full MEM device. Since MEM device design involves multiple physical energy domains as well as their coupling effects, the models describing the behavior of MEM devices are quite complex and usually computationally too expensive for a fully coupled treatment on the device level, for instance by the finite element method. We present an approach that allows for the automated extraction (implemented as a MATLAB-based toolbox) of multi-energy domain coupled macromodels with acceptable computation times. In this work, we perform measurements to validate the macromodels and to identify limitations.

Validation of a Multi-Energy Domain Coupled Macromodel for Viscously Damped MEMS at Varying Pressure Conditions

Iannacci, Jacopo;
2010

Abstract

Microelectromechanical (MEM) acceleration sensors are packaged at specifically chosen pressure levels in order to generate a defined viscous damping force on the moving microstructures. This specially designed damping force is crucial for the correct operation of the device [1]. To calculate the pressure levels that correspond to the desired damping force and to evaluate the sensitivity w.r.t. pressure changes, e.g. due to package leakage, the designers need models that allow for the predictive and fast transient simulation of the full MEM device. Since MEM device design involves multiple physical energy domains as well as their coupling effects, the models describing the behavior of MEM devices are quite complex and usually computationally too expensive for a fully coupled treatment on the device level, for instance by the finite element method. We present an approach that allows for the automated extraction (implemented as a MATLAB-based toolbox) of multi-energy domain coupled macromodels with acceptable computation times. In this work, we perform measurements to validate the macromodels and to identify limitations.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11582/8469
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