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EnglishA CMOS interface for a piston-type MEMS capacitive microphone is presented. It performs a capacitance-to-voltage conversion by bootstrapping the sensor through a voltage pre-amplifier, feeding a third-order sigma-delta modulator. The bootstrapping performs active parasitic compensation, improving the readout sensitivity by ~12 dB. The total current consumption is 460 uA at 1.8 V-supply. The digital output achieves 80 dBA-DR, with 63 dBA peak-SNR, using 0.35 um 2P/4M CMOS technology. The paper includes electrical and acoustic measurement results for the interface.
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| Titolo: | A 828μW 1.8V 80dB dynamic-range readout interface for a MEMS capacitive microphone | |
| Autori: | ||
| Data di pubblicazione: | 2008 | |
| Abstract: | A CMOS interface for a piston-type MEMS capacitive microphone is presented. It performs a capacitance-to-voltage conversion by bootstrapping the sensor through a voltage pre-amplifier, feeding a third-order sigma-delta modulator. The bootstrapping performs active parasitic compensation, improving the readout sensitivity by ~12 dB. The total current consumption is 460 uA at 1.8 V-supply. The digital output achieves 80 dBA-DR, with 63 dBA peak-SNR, using 0.35 um 2P/4M CMOS technology. The paper includes electrical and acoustic measurement results for the interface. | |
| Handle: | http://hdl.handle.net/11582/8085 | |
| ISBN: | 9781424423613 | |
| Appare nelle tipologie: | 4.1 Contributo in Atti di convegno |
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http://hdl.handle.net/11582/8085
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