We present a comprehensive study on an electrostatically actuated RF-MEMS switch with active thermal recovery capability intended to counteract stiction. On the basis of finite element (FE) simulations a detailed model including all relevant physical effects has been developed to investigate this recovery mechanism. The resulting model enables to reproduce the whole recovery process during a failure situation of the switch, proving its functionality and, thus, identifying and elaborating possible design improvements. The simulated results are confirmed by experimental data obtained from white-light interferometry (VEECO) and laser-Doppler vibrometry (Polytec).
Study of an active thermal recovery mechanism for an electrostatically actuated RF-MEMS switch
Iannacci, Jacopo;
2012-01-01
Abstract
We present a comprehensive study on an electrostatically actuated RF-MEMS switch with active thermal recovery capability intended to counteract stiction. On the basis of finite element (FE) simulations a detailed model including all relevant physical effects has been developed to investigate this recovery mechanism. The resulting model enables to reproduce the whole recovery process during a failure situation of the switch, proving its functionality and, thus, identifying and elaborating possible design improvements. The simulated results are confirmed by experimental data obtained from white-light interferometry (VEECO) and laser-Doppler vibrometry (Polytec).| File | Dimensione | Formato | |
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